Invention Grant
- Patent Title: Electrostatic discharge resistant diodes
- Patent Title (中): 静电放电二极管
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Application No.: US13714404Application Date: 2012-12-14
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Publication No.: US09054124B2Publication Date: 2015-06-09
- Inventor: Huiming Bu , Robert J. Gauthier, Jr. , Terence B. Hook , Effendi Leobandung , Tenko Yamashita
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/66 ; H01L29/861 ; H01L29/74 ; H01L29/06 ; H01L27/02 ; H01L21/84

Abstract:
A diode and a method for an electrostatic discharge resistant diode. The method includes, for example, receiving a wafer. The wafer includes a silicon layer electrically isolated from a silicon substrate by a buried oxide (BOX) layer. The BOX layer is in physical contact with the silicon layer and the silicon substrate. An N-type well is implanted in the silicon substrate. Furthermore, a vertical column of P+ doped epitaxial silicon and a vertical column of N+ doped epitaxial silicon are formed over the N-type well and extend through the BOX layer and the silicon layer. Both vertical columns may form electrical junctions with the N-type well.
Public/Granted literature
- US20140167202A1 ELECTROSTATIC DISCHARGE RESISTANT DIODES Public/Granted day:2014-06-19
Information query
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