Invention Grant
- Patent Title: Chemical liquid supplying apparatus
- Patent Title (中): 化学液体供给装置
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Application No.: US13808432Application Date: 2011-01-31
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Publication No.: US09054139B2Publication Date: 2015-06-09
- Inventor: Hiroyuki Muraoka
- Applicant: Hiroyuki Muraoka
- Applicant Address: JP Tokyo
- Assignee: Koganei Corporation
- Current Assignee: Koganei Corporation
- Current Assignee Address: JP Tokyo
- Agency: McCormick, Paulding & Huber LLP
- Priority: JP2010-156339 20100709
- International Application: PCT/JP2011/051921 WO 20110131
- International Announcement: WO2012/005015 WO 20120112
- Main IPC: F04B43/08
- IPC: F04B43/08 ; H01L21/67 ; F04B43/107

Abstract:
In a chemical liquid supplying apparatus 10a for discharging chemical liquid by expanding and contracting a pump chamber 16 which communicates with a chemical liquid inlet 21 and a chemical liquid outlet 22, the apparatus has a cylinder 12 in which a piston 31 is accommodated and reciprocally movable in an axial direction. A bellows 35 which is elastically deformable in the axial direction is mounted to a cylinder hole 30 between the tip of a connection rod 34 and the cylinder 12. On the inside of the bellows 35, an expanding/contracting chamber 37 is formed as a compartment between the connection rod 34 and the bellows 35, a pressure chamber 38 which communicates with the expanding/contracting chamber 37 is provided on the tip side of the piston 31, and an incompressible indirect medium 39 is enclosed in the expanding/contracting chamber 37 and the pressure chamber 38. The average effective diameter D2 of this bellows 35 is set so as to be smaller than the outer diameter D1 of a sliding surface 32 of the piston 31.
Public/Granted literature
- US20130101444A1 CHEMICAL LIQUID SUPPLYING APPARATUS Public/Granted day:2013-04-25
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