Invention Grant
- Patent Title: High ion and low sub-threshold swing tunneling transistor
- Patent Title (中): 高离子和低亚阈值摆动隧道晶体管
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Application No.: US14055893Application Date: 2013-10-17
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Publication No.: US09054191B2Publication Date: 2015-06-09
- Inventor: Eng Huat Toh , Shyue Seng Tan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8238 ; H01L29/78 ; H01L29/66 ; H01L29/40 ; H01L21/8234

Abstract:
Devices and manufacturing methods thereof are presented. The device includes a substrate and a fin-type transistor disposed on the substrate. The transistor includes a fin structure that protrudes from the substrate to serve as a source of the transistor. The fin structure is doped with dopants of a first polarity. The transistor also includes a gate layer formed over and around a first end of the fin structure to serve as a gate of the transistor. A drain layer is disposed over the fin structure and adjacent to the gate layer to serve as a drain of the transistor. The drain layer is doped with dopants of a second polarity opposite the first polarity.
Public/Granted literature
- US20150108432A1 HIGH ION AND LOW SUB-THRESHOLD SWING TUNNELING TRANSISTOR Public/Granted day:2015-04-23
Information query
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