Invention Grant
- Patent Title: Process of forming a grid electrode on the front-side of a silicon wafer
- Patent Title (中): 在硅晶片的正面形成栅电极的工艺
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Application No.: US13917753Application Date: 2013-06-14
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Publication No.: US09054239B2Publication Date: 2015-06-09
- Inventor: Russell David Anderson , Kenneth Warren Hang , Shih-Ming Kao , Giovanna Laudisio , Cheng-Nan Lin , Chun-Kwei Wu
- Applicant: E I DU PONT DE NEMOURS AND COMPANY
- Applicant Address: US DE Wilmington
- Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee Address: US DE Wilmington
- Main IPC: H01L31/0224
- IPC: H01L31/0224 ; C03C8/02 ; C03C8/10 ; C03C8/24 ; H01B1/16

Abstract:
A process of forming a front-grid electrode on a silicon wafer having an ARC layer, comprising the steps: (1) printing and drying a metal paste A comprising an inorganic content comprising 0.5 to 8 wt.-% of glass frit and having fire-through capability, wherein the metal paste A is printed on the ARC layer to form a bottom set of thin parallel finger lines, (2) printing and drying a metal paste B comprising an inorganic content comprising 0.2 to 3 wt.-% of glass frit over the bottom set of finger lines, wherein the metal paste B is printed in a grid pattern which comprises (i) thin parallel finger lines forming a top set of finger lines superimposing the bottom set of finger lines and (ii) busbars intersecting the finger lines at right angle, and (3) firing the double-printed silicon wafer, wherein the inorganic content of metal paste B contains less glass frit plus optionally present other inorganic additives than the inorganic content of metal paste A.
Public/Granted literature
- US20130276881A1 PROCESS OF FORMING A GRID ELECTRODE ON THE FRONT-SIDE OF A SILICON WAFER Public/Granted day:2013-10-24
Information query
IPC分类: