Invention Grant
- Patent Title: Method of manufacturing light absorbing layer for solar cell using selenization process under element selenium vapor ambience and thermal treatment apparatus for manufacturing light absorbing layer
- Patent Title (中): 元素硒蒸气环境下使用硒化工艺制造太阳能电池用光吸收层的方法及制造光吸收层的热处理装置
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Application No.: US14514691Application Date: 2014-10-15
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Publication No.: US09054267B2Publication Date: 2015-06-09
- Inventor: Seong Hoon Song
- Applicant: SEMICS INC.
- Applicant Address: KR
- Assignee: SEMICS INC.
- Current Assignee: SEMICS INC.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2011-0052459 20110531
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; H01L31/032
Abstract:
A method of manufacturing a light absorbing layer for a solar cell by performing thermal treatment on a specimen configured to include thin films of one or more of copper, indium, and gallium on a substrate and element selenium, includes steps of: heating a wall of a chamber up to a predefined thin film formation temperature in order to maintain a selenium vapor pressure; mounting the specimen and the element selenium on the susceptor at the room temperature and loading the susceptor in the chamber; and heating the specimen in the lower portion of the susceptor and, at the same time, heating the element selenium in the upper portion of the susceptor.
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