Invention Grant
- Patent Title: Piezoelectric element and method for manufacturing the same
- Patent Title (中): 压电元件及其制造方法
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Application No.: US13455315Application Date: 2012-04-25
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Publication No.: US09054293B2Publication Date: 2015-06-09
- Inventor: Toshinari Noda , Kazuki Komaki
- Applicant: Toshinari Noda , Kazuki Komaki
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: RatnerPrestia
- Priority: JP2008-168352 20080627; JP2008-295217 20081119
- Main IPC: H01L41/16
- IPC: H01L41/16 ; H01L41/047 ; H01L41/187 ; H01L41/08 ; H01L41/318

Abstract:
A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.
Public/Granted literature
- US20120206019A1 PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-08-16
Information query
IPC分类: