Invention Grant
- Patent Title: Method for manufacturing organic light-emitting device
- Patent Title (中): 制造有机发光装置的方法
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Application No.: US13619390Application Date: 2012-09-14
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Publication No.: US09054315B2Publication Date: 2015-06-09
- Inventor: Manabu Otsuka , Tomoyuki Hiroki
- Applicant: Manabu Otsuka , Tomoyuki Hiroki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2011-217662 20110930; JP2012-191771 20120831
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/00 ; H01L51/56 ; H01L27/32

Abstract:
A method for manufacturing a light-emitting device includes a step of forming an etching resistant protection layer on a substrate provided with an organic planarizing layer, a step of forming a plurality of electrodes on the etching resistant protection layer, a step of forming an organic compound layer on the substrate provided with the plurality of electrodes, a step of forming a resist layer on the organic compound layer formed on parts of electrodes among the plurality of electrodes using a photolithographic method, and a step of removing the organic compound layer in a region not covered with the resist layer by dry etching, wherein an entire surface of the organic planarizing layer on the substrate on which steps up to the step of forming the plurality of electrodes have been performed is covered with at least one of the etching resistant protection layer and the electrode.
Public/Granted literature
- US09006019B2 Method for manufacturing organic light-emitting device Public/Granted day:2015-04-14
Information query
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