Invention Grant
- Patent Title: Vertical-cavity surface-emitting laser and method of fabricating the same
- Patent Title (中): 垂直腔表面发射激光器及其制造方法
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Application No.: US13974891Application Date: 2013-08-23
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Publication No.: US09054496B2Publication Date: 2015-06-09
- Inventor: Hyun Woo Song
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2012-0103345 20120918
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/183 ; H01S5/20 ; H01S5/06

Abstract:
Provided are a wavelength swept vertical-cavity surface-emitting laser and a method of fabricating the same. The laser may include a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer disposed on a first side of the active layer, a stopper disposed on a second side of the active layer that may be spaced apart from the sacrificial layer, and an upper reflection layer fixed on the sacrificial layer, the upper reflection layer extending over the stopper and the active layer. The stopper defines a minimum separation distance between the upper reflection layer and the active layer.
Public/Granted literature
- US20140079085A1 VERTICAL-CAVITY SURFACE-EMITTING LASER AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-03-20
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