Invention Grant
US09054496B2 Vertical-cavity surface-emitting laser and method of fabricating the same 有权
垂直腔表面发射激光器及其制造方法

Vertical-cavity surface-emitting laser and method of fabricating the same
Abstract:
Provided are a wavelength swept vertical-cavity surface-emitting laser and a method of fabricating the same. The laser may include a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer disposed on a first side of the active layer, a stopper disposed on a second side of the active layer that may be spaced apart from the sacrificial layer, and an upper reflection layer fixed on the sacrificial layer, the upper reflection layer extending over the stopper and the active layer. The stopper defines a minimum separation distance between the upper reflection layer and the active layer.
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