Invention Grant
- Patent Title: Micromechanical resonator arrangement
- Patent Title (中): 微机械谐振器装置
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Application No.: US14103227Application Date: 2013-12-11
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Publication No.: US09054636B2Publication Date: 2015-06-09
- Inventor: Ulrich Hofmann , Joachim Janes
- Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicant Address: DE
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee Address: DE
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: DE102012222988 20121212
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H03B5/30 ; B81B3/00 ; H03H9/00 ; G02B26/10
Abstract:
The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.
Public/Granted literature
- US20140159827A1 MICROMECHANICAL RESONATOR ARRANGEMENT Public/Granted day:2014-06-12
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