Invention Grant
US09055701B2 Method and system for improving alignment precision of parts in MEMS
有权
提高MEMS零件对准精度的方法和系统
- Patent Title: Method and system for improving alignment precision of parts in MEMS
- Patent Title (中): 提高MEMS零件对准精度的方法和系统
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Application No.: US13798449Application Date: 2013-03-13
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Publication No.: US09055701B2Publication Date: 2015-06-09
- Inventor: Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann; L. Jeffrey Kelly
- Main IPC: H05K3/30
- IPC: H05K3/30 ; H05K3/00 ; H05K3/20 ; H01L23/48 ; H01L23/52 ; H01L29/40 ; B81C3/00
Abstract:
An improved alignment precision of Micro-Electromechanical Systems (MEMS). A method includes two parts of MEMS separated by at least one rolling element having a first diameter, where the rolling element is maintained on one of the two parts using a thermally dissipative material, horizontally aligning the two parts by pivoting one of the two parts about the rolling element, and locking the two parts together.
Public/Granted literature
- US20130205588A1 Method and System for Improving Alignment Precision of Parts in MEMS Public/Granted day:2013-08-15
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