Invention Grant
US09061314B2 Vacuum chamber system of coating apparatus and coating method using the same 有权
真空室系统的涂布设备和涂布方法采用相同的方法

Vacuum chamber system of coating apparatus and coating method using the same
Abstract:
There are provided a vacuum chamber system of a coating apparatus and a coating method using the same that prevents the attraction phenomenon of a coating solution in intermittent coating, so that the failure rate of coating is reduced, thereby improving the quality of products. In one embodiment, a vacuum chamber system of a coating apparatus includes a vacuum chamber connected to a coating solution outlet of the coating apparatus. A sound pressure generating unit is connected to one region of the vacuum chamber to generate sound pressure. A buffer tank is provided between the vacuum chamber and the sound pressure generating unit. In the vacuum chamber system, a control unit is further provided between the vacuum chamber and the buffer tank. The control unit controls air to be selectively inhaled or blocked from the vacuum chamber and the sound pressure generating unit.
Information query
Patent Agency Ranking
0/0