Invention Grant
- Patent Title: Method for making micron or submicron cavities
- Patent Title (中): 制造微米或亚微米孔的方法
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Application No.: US13108663Application Date: 2011-05-16
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Publication No.: US09063410B2Publication Date: 2015-06-23
- Inventor: Stéphane Caplet , Claude Venin
- Applicant: Stéphane Caplet , Claude Venin
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0852256 20080404
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; G03F1/00 ; G02F1/1333

Abstract:
A method for forming a micro-optical or sub-micro-optical device is provided, including: forming a photolithographic mask on a transparent support, depositing a layer of a photosensitive material of negative polarity on the face, a so called front face, of the support which supports the mask, wherein the mask is disposed under the areas where the photosensitive material should be removed, insolating the layer of the photosensitive material through the rear face of the support, developing the photosensitive material in order to obtain walls of micron or submicron cavities, removing the mask areas located at the bottom of the cavities in order to obtain cavities without any mask material between the walls, introducing a fluid into the cavities of the device, and forming a closure layer on the walls in photosensitive material.
Public/Granted literature
- US20110287370A1 METHOD FOR MAKING MICRON OR SUBMICRON CAVITIES Public/Granted day:2011-11-24
Information query
IPC分类: