Invention Grant
- Patent Title: Method and apparatus for removing a vertically-oriented substrate from a cassette
- Patent Title (中): 从盒中去除垂直取向的基板的方法和装置
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Application No.: US13268109Application Date: 2011-10-07
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Publication No.: US09070730B2Publication Date: 2015-06-30
- Inventor: John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
- Applicant: John Robert Fairhurst , Jeffrey E. Krampert , Richard J. Hertel
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687

Abstract:
A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
Public/Granted literature
- US20130089395A1 METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE FROM A CASSETTE Public/Granted day:2013-04-11
Information query
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