Invention Grant
- Patent Title: Electroplating using dielectric bridges
- Patent Title (中): 使用介质桥电镀
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Application No.: US14039384Application Date: 2013-09-27
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Publication No.: US09070747B2Publication Date: 2015-06-30
- Inventor: Eugene A. Stout , Douglas M. Scott , Anthony P. Curtis , Theodore G. Tessier , Guy F. Burgess
- Applicant: FlipChip International, LLC
- Applicant Address: US AZ Phoenix
- Assignee: Flipchip International LLC
- Current Assignee: Flipchip International LLC
- Current Assignee Address: US AZ Phoenix
- Agent Arno T. Naeckel
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/768 ; H01L21/78 ; H01L23/31

Abstract:
Structures and methods provide a dielectric bridge for use in electroplating. A method comprises: providing a semiconductor wafer with a plurality of die, wherein a first die is adjacent to a second die, and the first die and second die are separated by a dicing street area; forming a patterned dielectric layer overlying the semiconductor wafer, the dielectric layer including a dielectric bridge that crosses the dicing street area; forming a conductive layer (e.g., a metal seed layer) overlying the dielectric layer, wherein a portion of the conductive layer is overlying the dielectric bridge to provide a current pathway from the first die to the second die; and electroplating targeted areas of the conductive layer by providing current to the second die using the current pathway. Other such bridges formed from the dielectric layer provide current pathways to other die on the wafer.
Public/Granted literature
- US20150001684A1 ELECTROPLATING USING DIELECTRIC BRIDGES Public/Granted day:2015-01-01
Information query
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