Invention Grant
US09070756B2 Group III nitride high electron mobility transistor (HEMT) device
有权
III族氮化物高电子迁移率晶体管(HEMT)器件
- Patent Title: Group III nitride high electron mobility transistor (HEMT) device
- Patent Title (中): III族氮化物高电子迁移率晶体管(HEMT)器件
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Application No.: US14357911Application Date: 2012-11-16
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Publication No.: US09070756B2Publication Date: 2015-06-30
- Inventor: Yong Cai , Guohao Yu , Zhihua Dong , Baoshun Zhang
- Applicant: Suzhou Institute of Nano-Tech and Nano-Bionics of Chinese Academy of Science
- Applicant Address: CN Suzhou
- Assignee: Suzhou Institute of Nano-Tech and Nano-Bionics of Chinese Academy of Sciences
- Current Assignee: Suzhou Institute of Nano-Tech and Nano-Bionics of Chinese Academy of Sciences
- Current Assignee Address: CN Suzhou
- Agency: Wang Law Firm, Inc.
- Agent Li K. Wang; Stephen Hsu
- Priority: CN201110366992 20111118; CN201110367070 20111118; CN201110367190 20111118
- International Application: PCT/CN2012/001552 WO 20121116
- International Announcement: WO2013/071699 WO 20130523
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/778 ; H01L29/423 ; H01L29/10 ; H01L29/20

Abstract:
A group III nitride high electron mobility transistor (HEMT) device comprises a source electrode (112), a drain electrode (111), a main gate (116), a top gate (118), an insulating dielectric layer (117) and a heterostructure, wherein the source electrode (112) and the drain electrode (111) are electrically connected via two-dimensional electron gas (2DEG) formed in the heterostructure; the heterostructure comprises a first semiconductor (113) and a second semiconductor (114); the first semiconductor (113) is disposed between the source electrode (112) and drain electrode (111); the second semiconductor (114) is formed on the surface of the first semiconductor (113) and is provided with a band gap wider than the first semiconductor (113); the main gate (116) is disposed at the side of the surface of the second semiconductor (114) adjacent to the source electrode (112), and is in Schottky contact with the second semiconductor (114); the dielectric layer (117) is disposed on the surfaces of the second semiconductor (114) and the main gate (116) and between the source electrode (112) and the drain electrode (111); the top gate (118) is formed on the surface of the dielectric layer (117), at least one side edge of the top gate extends towards the direction of the source electrode (112) or the drain electrode (111), and the orthographic projection of the top gate overlaps with the two side edges of the main gate (116). When the HEMT device is at work, the main gate (116) and the top gate (118) are respectively controlled by a control signal. The device can effectively inhibit the “current collapse effect”.
Public/Granted literature
- US20140319584A1 Group III Nitride High Electron Mobility Transistor (HEMT) Device Public/Granted day:2014-10-30
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