Invention Grant
- Patent Title: Method for monitoring flexural vibrations of a piezoactuator
- Patent Title (中): 监测压电致动器的弯曲振动的方法
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Application No.: US13813341Application Date: 2011-09-02
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Publication No.: US09070879B2Publication Date: 2015-06-30
- Inventor: Reinhard Gabl
- Applicant: Reinhard Gabl
- Applicant Address: DE Munich
- Assignee: EPCOS AG
- Current Assignee: EPCOS AG
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Priority: DE102010036257 20100903
- International Application: PCT/EP2011/065238 WO 20110902
- International Announcement: WO2012/028735 WO 20120308
- Main IPC: H01L41/25
- IPC: H01L41/25 ; G01H1/04 ; H01L41/053 ; G01R29/22
Abstract:
In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.
Public/Granted literature
- US20130212848A1 Method for Monitoring Flexural Vibrations of a Piezoactuator Public/Granted day:2013-08-22
Information query
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