Invention Grant
US09072210B2 Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element 有权
基板盒,基板处理装置,基板处理系统,控制装置以及显示元件的制造方法

Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
Abstract:
In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
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