Invention Grant
- Patent Title: Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
- Patent Title (中): 基板盒,基板处理装置,基板处理系统,控制装置以及显示元件的制造方法
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Application No.: US14306848Application Date: 2014-06-17
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Publication No.: US09072210B2Publication Date: 2015-06-30
- Inventor: Tohru Kiuchi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2009-219953 20090925
- Main IPC: B41J15/04
- IPC: B41J15/04 ; H05K13/00 ; H01L21/67

Abstract:
In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
Public/Granted literature
Information query
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