Invention Grant
US09073103B2 Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method
有权
液体处理装置，液体处理方法和具有用于执行相同方法的计算机程序的记录介质
- Patent Title: Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method
- Patent Title (中): 液体处理装置，液体处理方法和具有用于执行相同方法的计算机程序的记录介质
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Application No.: US13161236Application Date: 2011-06-15
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Publication No.: US09073103B2Publication Date: 2015-07-07
- Inventor: Satoshi Morita , Nobuhiro Ogata , Shuichi Nagamine , Kenji Kiyota
- Applicant: Satoshi Morita , Nobuhiro Ogata , Shuichi Nagamine , Kenji Kiyota
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2011-050389 20110308
- Main IPC: B08B15/00
- IPC: B08B15/00 ; H01L21/67
Abstract:
Disclosed is a liquid processing apparatus which includes: a plurality of liquid processing units to supply a processing liquid to an object to be processed and liquid-process the object; a common exhaust path to discharge atmospheres in the plurality of liquid processing units; an individual exhaust path to connect the common exhaust path with each of the liquid processing units; an opening-closing mechanism provided on the individual exhaust path to be openable; and an air injecting port to inject an air into the common exhaust path. An injection amount adjusting valve is provided on the common exhaust path to adjust the flow rate of the air injected from the air injecting port. A controller controls an opening degree of the injection amount adjusting valve based on an opening-closing state of the opening-closing mechanism.
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