Invention Grant
- Patent Title: Method for slicing wafers from a workpiece
- Patent Title (中): 从工件切片晶圆的方法
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Application No.: US13423350Application Date: 2012-03-19
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Publication No.: US09073135B2Publication Date: 2015-07-07
- Inventor: Anton Huber , Wolfgang Gmach , Robert Kreuzeder , Peter Wiesner
- Applicant: Anton Huber , Wolfgang Gmach , Robert Kreuzeder , Peter Wiesner
- Applicant Address: DE Munich
- Assignee: SILTRONIC AG
- Current Assignee: SILTRONIC AG
- Current Assignee Address: DE Munich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102011005949 20110323
- Main IPC: B28D5/00
- IPC: B28D5/00 ; B28D1/08 ; B23D57/00 ; B28D5/04

Abstract:
A method for slicing wafers from a workpiece includes providing wire guide rolls that each have a grooved coating with a specific thickness, providing a fixed bearing respectively associated with each wire guide roll and providing a sawing wire including wire sections disposed in a parallel fashion. The wire sections are tensioned between the wire guide rolls and are moved relative to the workpiece so as to perform a sawing operation. The wire guide rolls cooled and the fixed bearings are cooled independently of the wire guide rolls.
Public/Granted literature
- US20120240915A1 METHOD FOR SLICING WAFERS FROM A WORKPIECE Public/Granted day:2012-09-27
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