Invention Grant
- Patent Title: Feedback control of polishing using optical detection of clearance
- Patent Title (中): 使用光学检测间隙的抛光反馈控制
-
Application No.: US13223159Application Date: 2011-08-31
-
Publication No.: US09073169B2Publication Date: 2015-07-07
- Inventor: Kun Xu , Ingemar Carlsson , Feng Q. Liu , David Maxwell Gage , You Wang , Dominic J. Benvegnu , Boguslaw A. Swedek , Yuchun Wang , Pierre Fontarensky , Wen-Chiang Tu , Lakshmanan Karuppiah
- Applicant: Kun Xu , Ingemar Carlsson , Feng Q. Liu , David Maxwell Gage , You Wang , Dominic J. Benvegnu , Boguslaw A. Swedek , Yuchun Wang , Pierre Fontarensky , Wen-Chiang Tu , Lakshmanan Karuppiah
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L21/00 ; B24B49/00 ; B24B37/005 ; B24B37/04 ; B24B37/10 ; B24B37/30 ; B24B49/12 ; G01B11/06

Abstract:
A method of controlling polishing includes polishing a first substrate having an overlying layer on an underlying layer or layer structure. During polishing, the substrate is monitored with an in-situ monitoring system to generate a sequence of measurements. The measurements are sorted into groups, each group associated with a different zone of a plurality of zones on the substrate. For each zone, a time at which the overlying layer is cleared is determined based on the measurements from the associated group. At least one second adjusted polishing pressure for at least zone is calculated based on a pressure applied in the at least one zone during polishing the substrate, the time for the at least one zone, and the time for another zone. A second substrate is polished using the at least one adjusted polishing pressure.
Public/Granted literature
- US20120064801A1 Feedback Control of Polishing Using Optical Detection of Clearance Public/Granted day:2012-03-15
Information query