Invention Grant
- Patent Title: Alkaline-earth metal oxide-polymeric polishing pad
- Patent Title (中): 碱土金属氧化物 - 聚合物抛光垫
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Application No.: US13469527Application Date: 2012-05-11
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Publication No.: US09073172B2Publication Date: 2015-07-07
- Inventor: David B. James , Donna M. Alden , Andrew R. Wank
- Applicant: David B. James , Donna M. Alden , Andrew R. Wank
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24D11/00
- IPC: B24D11/00 ; B24B37/24 ; C09G1/02

Abstract:
The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. The polishing pad includes a polymeric matrix, the polymeric matrix having a polishing surface. In addition, polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. The polymeric microelements have an outer surface and being fluid-filled for creating texture at the polishing surface. And alkaline-earth metal oxide-containing regions are distributed within each of the polymeric microelements and spaced to coat less than 50 percent of the outer surface of the polymeric microelements.
Public/Granted literature
- US20130303061A1 Alkaline-Earth Metal Oxide-Polymeric Polishing Pad Public/Granted day:2013-11-14
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