Invention Grant
- Patent Title: Method for shape modification of polishing pad
- Patent Title (中): 抛光垫形状修改方法
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Application No.: US12981305Application Date: 2010-12-29
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Publication No.: US09073173B2Publication Date: 2015-07-07
- Inventor: Hiroshi Takai , Yuichi Nakayoshi
- Applicant: Hiroshi Takai , Yuichi Nakayoshi
- Applicant Address: JP Tokyo
- Assignee: SUMCO Corporation
- Current Assignee: SUMCO Corporation
- Current Assignee Address: JP Tokyo
- Agency: Pepper Hamilton LLP
- Agent Thomas J. Engellenner; Reza Mollaaghababa
- Priority: JP2010-004807 20100113
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B49/18 ; B24B37/04 ; B24B53/017 ; B24B27/00

Abstract:
A polishing pad shape measured by a polishing pad shape measuring apparatus is modified into a target shape of a polishing pad by using a dressing tool so that a wafer has a desired surface shape. The invention is a method for shape modification of a polishing pad 14 for polishing a workpiece into a desired surface shape, comprising: a measurement step S9 of measuring a polishing pad shape in a state of being attached to a plate 12 by using a polishing pad shape measuring apparatus 10; a condition determination step S10 of selecting a dressing recipe capable of polishing the workpiece into a desired surface shape from a plurality of pre-provided dressing recipes based on the measurement result in the measurement step S9; and a shape modification step S11 of dressing the polishing pad 14 by using the dressing recipe determined in the condition determination step S10.
Public/Granted literature
- US20110171885A1 METHOD FOR SHAPE MODIFICATION OF POLISHING PAD Public/Granted day:2011-07-14
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