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US09073258B2 Methods for making photostructured acoustic devices 有权
制作光电声学装置的方法

Methods for making photostructured acoustic devices
Abstract:
A photostructurable ceramic is processed using photostructuring process steps for embedding devices within a photostructurable ceramic volume, the devices may include one or more of chemical, mechanical, electronic, electromagnetic, optical, and acoustic devices, all made in part by creating device material within the ceramic or by disposing a device material through surface ports of the ceramic volume, with the devices being interconnected using internal connections and surface interfaces.
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