Invention Grant
- Patent Title: Physical quantity sensor and electronic apparatus
- Patent Title (中): 物理量传感器和电子设备
-
Application No.: US13857317Application Date: 2013-04-05
-
Publication No.: US09073744B2Publication Date: 2015-07-07
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-088607 20120409
- Main IPC: G01L1/00
- IPC: G01L1/00 ; B81B3/00

Abstract:
A physical quantity sensor includes a substrate, a movable body which has first and second sections and in which a first movable electrode section is provided in the first section, a beam section which supports the movable body so as to be able to be displaced, and a first fixed electrode section disposed on the substrate. The first fixed electrode section is provided at a position overlapping an end of the first section in the second axis direction in plan view, and is provided in a range of 0.0500X≦L≦0.816X assuming that the width of the first section in the second axis direction is X and the width of a portion of the first fixed electrode section in the second axis direction overlapping the movable body in plan view is L.
Public/Granted literature
- US20130264661A1 PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS Public/Granted day:2013-10-10
Information query