Invention Grant
- Patent Title: Plasma film deposition device
- Patent Title (中): 等离子体膜沉积装置
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Application No.: US13486131Application Date: 2012-06-01
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Publication No.: US09074280B2Publication Date: 2015-07-07
- Inventor: Shao-Kai Pei
- Applicant: Shao-Kai Pei
- Applicant Address: TW New Taipei
- Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: TW New Taipei
- Agency: Novak Druce Connolly Bove + Quigg LLP
- Priority: TW100148722A 20111226
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/22 ; C23C14/32 ; H01J37/32

Abstract:
A plasma film deposition device includes a film deposition chamber, a plasma generator within the deposition chamber, a plurality of gas carrier boards adjustably mounted to the plasma generator, a gas providing system, and a rotating support bracket. The gas providing system provides working gas and protective gas. The rotating support bracket is assembled within the film deposition chamber, and is aligned with the plasma generator, for holding workpieces in certain orientations. The plasma generator ionizes the working gas into high-temperature plasma, and sprays the high-temperature plasma toward the rotating support bracket to form plasma films on the workpieces. A plasma jet area is defined between the rotating support bracket and the plasma generator, the gas carrier boards eject the protective gas toward the plasma jet area thereby adjusting the shape of the plasma jet area.
Public/Granted literature
- US20130160710A1 PLASMA FILM DEPOSITION DEVICE Public/Granted day:2013-06-27
Information query
IPC分类: