Invention Grant
- Patent Title: Systems for detecting unconfined-plasma events
- Patent Title (中): 无侧限等离子体事件检测系统
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Application No.: US12101804Application Date: 2008-04-11
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Publication No.: US09074285B2Publication Date: 2015-07-07
- Inventor: John Pease , Seyed Jafar Jafarian-Tehrani
- Applicant: John Pease , Seyed Jafar Jafarian-Tehrani
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F4/00 ; H01J37/32 ; H05H1/00

Abstract:
A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.
Public/Granted literature
- US20090151871A1 SYSTEMS FOR DETECTING UNCONFINED-PLASMA EVENTS Public/Granted day:2009-06-18
Information query
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