Invention Grant
US09074287B2 Reduced isotropic etchant material consumption and waste generation
有权
减少各向同性的蚀刻剂材料消耗和废物产生
- Patent Title: Reduced isotropic etchant material consumption and waste generation
- Patent Title (中): 减少各向同性的蚀刻剂材料消耗和废物产生
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Application No.: US14072944Application Date: 2013-11-06
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Publication No.: US09074287B2Publication Date: 2015-07-07
- Inventor: Steven T. Mayer , David W. Porter
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23F1/46 ; C23F1/08 ; C23F1/34 ; C25C7/00 ; H01L21/3213 ; H01L21/67 ; H01L21/306

Abstract:
Methods and apparatus for isotropically etching a metal from a work piece, while recovering and reconstituting the chemical etchant are described. Various embodiments include apparatus and methods for etching where the recovered and reconstituted etchant is reused in a continuous loop recirculation scheme. Steady state conditions can be achieved where these processes are repeated over and over with occasional bleed and feed to replenish reagents and/or adjust parameters such as pH, ionic strength, salinity and the like.
Public/Granted literature
- US20140061158A1 REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION Public/Granted day:2014-03-06
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