Invention Grant
- Patent Title: Line-width measurement device and measurement method using the same
- Patent Title (中): 线宽测量装置及其测量方法
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Application No.: US13700400Application Date: 2012-07-19
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Publication No.: US09074886B2Publication Date: 2015-07-07
- Inventor: Yung-yu Lin , Qingping Wang
- Applicant: Yung-yu Lin , Qingping Wang
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Agency: Kirton McConkie
- Agent Evan R. Witt
- International Application: PCT/CN2012/078887 WO 20120719
- International Announcement: WO2014/008679 WO 20140116
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G01C11/02 ; G01B11/02 ; G01N21/956

Abstract:
A line-width measurement device and a measurement method using the same are disclosed. The line-width measurement device has a platform, an image capturing device and a color-mixing light source device. The image capturing device captures an image of a pattern under measurement in a measurement area of the platform. The color-mixing light source device correspondingly provides illumination to the measurement area. The color-mixing light source device has a plurality of monochromatic light sources and adjusts the brightness scale of each monochromatic light source according to the matching rate of the pattern under measurement and a standard pattern to provide suitable color-mixed lights for illumination. Therefore, the present invention can provide a better measurement environment to further enhance accuracy of line-width measurement.
Public/Granted literature
- US20140009602A1 LINE-WIDTH MEASUREMENT DEVICE AND MEASUREMENT METHOD USING THE SAME Public/Granted day:2014-01-09
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