Invention Grant
US09074957B2 High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
有权
高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
- Patent Title: High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
- Patent Title (中): 高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
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Application No.: US13880733Application Date: 2012-05-28
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Publication No.: US09074957B2Publication Date: 2015-07-07
- Inventor: Junfeng Jiang , Tiegen Liu , Jinde Yin , Kun Liu , Yu Liu
- Applicant: Junfeng Jiang , Tiegen Liu , Jinde Yin , Kun Liu , Yu Liu
- Applicant Address: CN Tianjin
- Assignee: Tianjin University
- Current Assignee: Tianjin University
- Current Assignee Address: CN Tianjin
- Agency: Bei & Ocean
- Agent George G. Wang
- Priority: CN201110227369 20110809
- International Application: PCT/CN2012/076158 WO 20120528
- International Announcement: WO2013/020408 WO 20130214
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G02B1/00 ; G01L11/02 ; G02B26/00 ; G02B5/28 ; G02B6/293

Abstract:
The present invention relates to a high stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method. The sensor includes a sensor head, a sensor body with a through-hole in the axial direction and a optical fiber. The sensor head is a 4-layer structure, which includes the first silicon wafer, the first Pyrex glass wafer, the second silicon wafer and the second Pyrex glass wafer. The rear surface of the first silicon wafer forms the first reflecting surface of the fabry-perot (F-P) cavity, and the second silicon wafer provides the second reflecting surface for the F-P cavity. The second Pyrex glass wafer is welded together with the sensor body. The optical fiber is fixed in the sensor body by a CO2 laser welding to achieve the glue-free packing. When the external pressure is applied to deform the first layer silicon wafer, the F-P cavity length will change. When a broad band source is used, the variation of the cavity length can be obtained by collecting the reflection spectrum or low-coherence interference fringe of the sensor, thus the pressure information can be obtained. The structure of the invention can effectively eliminate the affect of environmental factors, such as temperature and humidity, and greatly promoting the measuring accuracy.
Public/Granted literature
- US20140208858A1 High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method Public/Granted day:2014-07-31
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