Invention Grant
- Patent Title: Microelectromechanical accelerometer with wireless transmission capabilities
- Patent Title (中): 具有无线传输能力的微机电加速度计
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Application No.: US13241665Application Date: 2011-09-23
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Publication No.: US09075078B2Publication Date: 2015-07-07
- Inventor: Horst Theuss
- Applicant: Horst Theuss
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Priority: DE102010046797 20100928
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P1/02 ; G01P15/11 ; G01P15/125 ; G01P15/18 ; G01P15/08
Abstract:
In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.
Public/Granted literature
- US20120073371A1 MICROELECTROMECHANICAL SENSOR Public/Granted day:2012-03-29
Information query
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