Invention Grant
US09075080B2 Method and apparatus for adaptive tracking using a scanning probe microscope
有权
使用扫描探针显微镜进行自适应跟踪的方法和装置
- Patent Title: Method and apparatus for adaptive tracking using a scanning probe microscope
- Patent Title (中): 使用扫描探针显微镜进行自适应跟踪的方法和装置
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Application No.: US14211484Application Date: 2014-03-14
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Publication No.: US09075080B2Publication Date: 2015-07-07
- Inventor: Judith Mosley , Johannes Kindt
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson, S.C.
- Main IPC: G01Q10/00
- IPC: G01Q10/00 ; G01Q10/06 ; B82Y35/00 ; G01Q30/04

Abstract:
Methods and apparatuses are described for adaptively tracking a feature of a sample using a scanning probe microscope. The adaptive technique provides an adaptive method for tracking the feature scan-to-scan despite actual or apparent changes in feature shape due, for example, to an evolving/transitioning state of the sample, and/or actual or apparent changing position due, for example, to movement of the sample and/or drift of the piezoelectric tube actuator. In a preferred embodiment, each scan may be processed line-by-line, or subpart-by-subpart, and may be analyzed either in real time or off-line. This processing technique improves speed, processing, reaction, and display times.
Public/Granted literature
- US20140283227A1 METHOD AND APPARATUS FOR ADAPTIVE TRACKING USING A SCANNING PROBE MICROSCOPE Public/Granted day:2014-09-18
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