Invention Grant
- Patent Title: Exposure device, photo-mask, and method for manufacturing liquid crystal display
- Patent Title (中): 曝光装置,光掩模和液晶显示器的制造方法
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Application No.: US13285789Application Date: 2011-10-31
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Publication No.: US09075323B2Publication Date: 2015-07-07
- Inventor: Jun Woo Lee , Soo-Ryun Cho , Baek Kyun Jeon , Joo Seok Yeom , Suk Hoon Kang , Kyoung Tae Kim
- Applicant: Jun Woo Lee , Soo-Ryun Cho , Baek Kyun Jeon , Joo Seok Yeom , Suk Hoon Kang , Kyoung Tae Kim
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2011-0063825 20110629
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The present invention is directed to an exposure apparatus and photo-mask, and method for manufacturing liquid crystal display using the same. An exposure apparatus according to an exemplary embodiment of the present invention provides an exposure apparatus which includes: a first photo-mask comprising a plurality of transmission parts; and a second photo-mask comprising a plurality of transmission parts, the first photo-mask and the second photo-mask comprising an overlapping region where the first photo-mask and the second photo-mask are partially overlapped, wherein at least one transmission part included in at least one of the first photo-mask and the second photo-mask in the overlapping region comprises a semi-transmission section, and a transmittance of the semi-transmission section is greater than or equal to 0% and less than 100%.
Public/Granted literature
- US20130003033A1 EXPOSURE DEVICE, PHOTO-MASK, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY Public/Granted day:2013-01-03
Information query
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