Invention Grant
- Patent Title: Beam positioning and pointing
- Patent Title (中): 光束定位和指向
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Application No.: US11840821Application Date: 2007-08-17
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Publication No.: US09075324B2Publication Date: 2015-07-07
- Inventor: Richard Carl Zimmerman , Roberto B. Wiener
- Applicant: Richard Carl Zimmerman , Roberto B. Wiener
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42 ; G03B27/32 ; G03F7/20 ; G02B26/08

Abstract:
A beam pointing and positioning system includes a first lens, movable in a first plane perpendicular to a nominal optical axis, which receives and positions a light beam. The system also includes a second lens, movable in a second plane perpendicular to the nominal optical axis, which receives and points the positioned light beam. The system is thereby capable of directing the light beam to a desired location at a desired angle. The system may also include a beam splitter that receives, transmits, and reflects the pointed light beam, one or more sensors that receive the reflected light beam, and a controller coupled to the sensor(s) and first and second lenses. The controller may control the positioning of the first and second lenses based on beam position and pointing data and/or signals received from the sensor(s). A method of positioning and pointing a light beam is also presented.
Public/Granted literature
- US20090046338A1 Beam Positioning and Pointing Public/Granted day:2009-02-19
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