Invention Grant
- Patent Title: 3D memory structure and manufacturing method of the same
- Patent Title (中): 3D内存结构和制造方法相同
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Application No.: US14144640Application Date: 2013-12-31
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Publication No.: US09076684B1Publication Date: 2015-07-07
- Inventor: Erh-Kun Lai
- Applicant: Macronix International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L27/115

Abstract:
A 3D memory structure and a manufacturing method of the same are provided. The 3D memory structure includes a substrate, a plurality of stacked structures, a plurality of charge trapping layers, a plurality of bit lines, and a plurality of stair structures. The stacked structures are formed on the substrate, and each of the stacked structures includes a plurality of gates and a plurality of gate insulators alternately stacked on the substrate. The charge trapping layers are formed on the sidewalls of the stacked structures. The bit lines are arranged orthogonally over the stacked structures, the surfaces of the bit lines crossing the stacked structures for forming a plurality of memory elements. The stair structures, each electrically connected to the different gates, are stacked on the substrate.
Public/Granted literature
- US20150187788A1 3D MEMORY STRUCTURE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2015-07-02
Information query
IPC分类: