Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US14018851Application Date: 2013-09-05
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Publication No.: US09076685B2Publication Date: 2015-07-07
- Inventor: Nobuhito Kuge , Tsukasa Nakai
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-108059 20130522
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L29/423 ; H01L29/66

Abstract:
According to one embodiment, a semiconductor memory device includes a lower gate layer, a stacked body including a plurality of electrode layers and a plurality of insulating layers, alternately stacked on the lower gate layer, a channel body extending within the stacked body from the topmost electrode layer to the lower gate layer, and a memory film provided between the electrode layer and the channel body. The memory film includes a charge storage film. The electrode layer includes a step portion in which a step is formed in a stacking direction of the stacked body. The channel body and the memory film pass through the step portion.
Public/Granted literature
- US20140346585A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-11-27
Information query
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