Invention Grant
- Patent Title: Substrate to which film is formed and organic EL display device
- Patent Title (中): 形成薄膜的基板和有机EL显示装置
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Application No.: US13979845Application Date: 2012-01-12
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Publication No.: US09076977B2Publication Date: 2015-07-07
- Inventor: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Morrison & Foerster LLP
- Priority: JP2011-008106 20110118
- International Application: PCT/JP2012/050526 WO 20120112
- International Announcement: WO2012/098994 WO 20120726
- Main IPC: H01L51/50
- IPC: H01L51/50 ; C23C14/04 ; H01L51/00 ; C23C14/24 ; H01L27/32

Abstract:
On the TFT substrate (10), a vapor deposition layer is formed by use of a vapor deposition device (50) which includes (i) a vapor deposition source (85) having injection holes (86) and (ii) a vapor deposition mask (81) having openings (82) through which vapor deposition particles injected from the injection holes (86) are deposited so as to form the vapor deposition layer. The TFT substrate (10) has a plurality of pixels two-dimensionally arranged in a pixel region (AG), and terminals of a plurality of wires (14), which are electrically connected with the plurality of pixels, are gathered outside a vapor deposition layer formation region.
Public/Granted literature
- US20130285038A1 SUBSTRATE TO WHICH FILM IS FORMED AND ORGANIC EL DISPLAY DEVICE Public/Granted day:2013-10-31
Information query
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