Invention Grant
- Patent Title: Method of manufacturing capacitor
- Patent Title (中): 制造电容器的方法
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Application No.: US13652717Application Date: 2012-10-16
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Publication No.: US09082552B2Publication Date: 2015-07-14
- Inventor: Yoshihiko Imanaka , Hideyuki Amada , Fumiaki Kumasaka
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2010-095017 20100416
- Main IPC: H01G7/00
- IPC: H01G7/00 ; H01G4/12 ; H01G13/00 ; H01L23/498 ; H01L23/50

Abstract:
A method of manufacturing a capacitor includes forming, above a first metal foil, a first dielectric film of a ceramic material containing barium oxide by blowing dry ceramic particles to the first metal foil from a nozzle, forming, in the first dielectric film, a first via conductor connected to the first metal foil and a second via conductor connected to the first metal foil, forming, above the first dielectric film, a first electrode pattern connected to the first via conductor, and patterning the first metal foil to form a second electrode pattern connected to the second via conductor.
Public/Granted literature
- US20130038981A1 CAPACITOR AND METHOD OF MANUFACTURING CAPACITOR Public/Granted day:2013-02-14
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