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US09082655B2 Method of manufacturing nonvolatile memory device including a channel pad 有权
包括通道垫的非易失性存储器件的制造方法

Method of manufacturing nonvolatile memory device including a channel pad
Abstract:
A nonvolatile memory device having a vertical structure and a method of manufacturing the same, the nonvolatile memory device including a channel region that vertically extends from a substrate; gate electrodes on the substrate, the gate electrodes being disposed along an outer side wall of the channel region and spaced apart from one another; and a channel pad that extends from one side of the channel region to an outside of the channel region, the channel pad covering a top surface of the channel region.
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