Invention Grant
US09082655B2 Method of manufacturing nonvolatile memory device including a channel pad
有权
包括通道垫的非易失性存储器件的制造方法
- Patent Title: Method of manufacturing nonvolatile memory device including a channel pad
- Patent Title (中): 包括通道垫的非易失性存储器件的制造方法
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Application No.: US14180670Application Date: 2014-02-14
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Publication No.: US09082655B2Publication Date: 2015-07-14
- Inventor: Eun-sun Youm , Sang-young Park , Jin-taek Park , Yong-top Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2011-0021042 20110309
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/115 ; H01L29/792

Abstract:
A nonvolatile memory device having a vertical structure and a method of manufacturing the same, the nonvolatile memory device including a channel region that vertically extends from a substrate; gate electrodes on the substrate, the gate electrodes being disposed along an outer side wall of the channel region and spaced apart from one another; and a channel pad that extends from one side of the channel region to an outside of the channel region, the channel pad covering a top surface of the channel region.
Public/Granted literature
- US20140162419A1 METHOD OF MANUFACTURING NONVOLATILE MEMORY DEVICE Public/Granted day:2014-06-12
Information query
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