Invention Grant
- Patent Title: Nitride semiconductor device
- Patent Title (中): 氮化物半导体器件
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Application No.: US13619560Application Date: 2012-09-14
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Publication No.: US09082691B2Publication Date: 2015-07-14
- Inventor: Akira Yoshioka , Yasunobu Saito , Hidetoshi Fujimoto , Tetsuya Ohno , Wataru Saito
- Applicant: Akira Yoshioka , Yasunobu Saito , Hidetoshi Fujimoto , Tetsuya Ohno , Wataru Saito
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2011-206340 20110921
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/20 ; H01L29/423 ; H01L29/778

Abstract:
A nitride semiconductor device includes a substrate, a first Inx1Ga1-x1-y1Aly1N layer, a second Inx2Ga1-x2-y2Aly2N layer, an interlayer insulating film, a source electrode, a drain electrode, a first gate electrode, a Schottky electrode, a second gate electrode, an interconnection layer. The second Inx2Ga1-x2-y2Aly2N layer is provided on a surface of the first Inx1Ga1-x1-y1Aly1N layer. The second Inx2Ga1-x2-y2Aly2N layer has a wider band gap than the first Inx1Ga1-x1-y1Aly1N layer. The first gate electrode is provided between the source electrode and the drain electrode on a surface of the second Inx2Ga1-x2-y2Aly2N layer. The Schottky electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the first gate electrode and the drain electrode. The second gate electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the Schottky electrode and the drain electrode. The interconnection layer electrically connects the source electrode, the Schottky electrode, and the second gate electrode.
Public/Granted literature
- US20130069117A1 NITRIDE SEMICONDUCTOR DEVICE Public/Granted day:2013-03-21
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