Invention Grant
- Patent Title: Combinatorial method for solid source doping process development
- Patent Title (中): 固体源掺杂工艺开发的组合方法
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Application No.: US14085706Application Date: 2013-11-20
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Publication No.: US09082729B2Publication Date: 2015-07-14
- Inventor: Khaled Ahmed
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/324 ; H01L21/02 ; H01L21/22 ; H01L21/66
Abstract:
One or more small spot showerhead apparatus are used to provide dopant exposure and/or to deposit materials using CVD, PECVD, ALD, or PEALD on small spots in a site isolated, combinatorial manner. The small spot showerheads may be configured within a larger combinatorial showerhead to allow multi-layer film stacks to be deposited in a combinatorial manner. Anneal processes where the area of the process can be controlled such as laser annealing or site-isolated rapid thermal processing (RTP) can be used to vary the annealing conditions in a combinatorial manner.
Public/Granted literature
- US20150140696A1 Combinatorial Method for Solid Source Doping Process Development Public/Granted day:2015-05-21
Information query
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