Invention Grant
- Patent Title: Polymer layers embedded with metal pads for heat dissipation
- Patent Title (中): 嵌入金属垫的聚合物层用于散热
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Application No.: US13907875Application Date: 2013-06-01
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Publication No.: US09082761B2Publication Date: 2015-07-14
- Inventor: Hao-Hsiang Chuang , Shih-Wei Liang , Ching-Feng Yang , Kai-Chiang Wu , Hao-Yi Tsai , Chuei-Tang Wang , Chen-Hua Yu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/12 ; H01L23/053 ; H01L23/495 ; H01L21/768

Abstract:
An integrated circuit structure includes a metal pad, a passivation layer including a portion over the metal pad, a first polymer layer over the passivation layer, and a first Post-Passivation Interconnect (PPI) extending into to the first polymer layer. The first PPI is electrically connected to the metal pad. A dummy metal pad is located in the first polymer layer. A second polymer layer is overlying the first polymer layer, the dummy metal pad, and the first PPI. An Under-Bump-Metallurgy (UBM) extends into the second polymer layer to electrically couple to the dummy metal pad.
Public/Granted literature
- US20140353819A1 Polymer Layers Embedded with Metal Pads for Heat Dissipation Public/Granted day:2014-12-04
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