Invention Grant
- Patent Title: Semiconductor device and method of forming a robust fan-out package including vertical interconnects and mechanical support layer
- Patent Title (中): 半导体器件和形成强大的扇出封装的方法,包括垂直互连和机械支撑层
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Application No.: US13428439Application Date: 2012-03-23
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Publication No.: US09082780B2Publication Date: 2015-07-14
- Inventor: Yaojian Lin , Kang Chen , Yu Gu
- Applicant: Yaojian Lin , Kang Chen , Yu Gu
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Atkins and Associates, P.C.
- Agent Roberty D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/56 ; H01L23/498 ; H01L23/00 ; H01L25/10 ; H01L23/538

Abstract:
A semiconductor device has a semiconductor die. An encapsulant is deposited around the semiconductor die. An interconnect structure having a conductive bump is formed over the encapsulant and semiconductor die. A mechanical support layer is formed over the interconnect structure and around the conductive bump. The mechanical support layer is formed over a corner of the semiconductor die and over a corner of the interconnect structure. An opening is formed through the encapsulant that extends to the interconnect structure. A conductive material is deposited within the opening to form a conductive through encapsulant via (TEV) that is electrically connected to the interconnect structure. A semiconductor device is mounted to the TEV and over the semiconductor die to form a package-on-package (PoP) device. A warpage balance layer is formed over the encapsulant opposite the interconnect structure.
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