Invention Grant
- Patent Title: Manufacturing method for semiconductor package, semiconductor package, and semiconductor device
- Patent Title (中): 半导体封装,半导体封装和半导体器件的制造方法
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Application No.: US14235766Application Date: 2012-10-18
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Publication No.: US09082825B2Publication Date: 2015-07-14
- Inventor: Hiromitsu Takashita , Tsuyoshi Takeda , Keiko Kashihara , Hiroaki Fujiwara , Shingo Yoshioka
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC CORPORATION
- Current Assignee: PANASONIC CORPORATION
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2011-229496 20111019; JP2011-244785 20111108; JP2011-244786 20111108
- International Application: PCT/JP2012/006675 WO 20121018
- International Announcement: WO2013/057949 WO 20130425
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/768 ; H01L21/56 ; H01L23/31 ; H01L23/538 ; H01L23/498 ; H01L23/48 ; H01L23/00

Abstract:
One aspect of the present invention resides in a manufacturing method for a semiconductor package, including a covering step of forming a covering insulating layer that covers the surface of a semiconductor element, a film-forming step of forming a resin film on the surface of the covering insulating layer, a circuit pattern-forming step of forming a circuit pattern portion including recesses reaching the surfaces of electrodes of the semiconductor element and a circuit groove having a desired shape and a desired depth, a catalyst-depositing step of depositing a plating catalyst or a precursor thereof on the surface of the circuit pattern portion, a film-separating step of separating the resin film from the covering insulating layer, and a plating processing step of forming a circuit electrically connected to the electrodes, by applying electroless plating to the covering insulating layer, from which the resin film is separated.
Public/Granted literature
- US20140191406A1 MANUFACTURING METHOD FOR SEMICONDUCTOR PACKAGE, SEMICONDUCTOR PACKAGE, AND SEMICONDUCTOR DEVICE Public/Granted day:2014-07-10
Information query
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