Invention Grant
- Patent Title: Field effect transistor
- Patent Title (中): 场效应晶体管
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Application No.: US13728093Application Date: 2012-12-27
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Publication No.: US09082836B2Publication Date: 2015-07-14
- Inventor: Ryota Senda
- Applicant: Ryota Senda
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neudstadt, L.L.P.
- Priority: JP2012-138860 20120620
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/40 ; H01L29/423 ; H01L29/778 ; H01L29/20

Abstract:
A field effect transistor includes a stacked body, a source electrode, a drain electrode, a gate electrode, a dielectric layer and a silicon nitride layer. The stacked layer has a heterojunction made of a nitride semiconductor. The source and drain electrodes are provided on a surface of the stacked body. The gate electrode is provided on the surface of the stacked body between the source and the drain electrodes, and has a field plate portion. The dielectric layer is provided so as to cover an intersection line of a first side surface of the gate electrode and the surface of the stacked body. The silicon nitride layer is provided so as to cover a region between the source electrode and the gate electrode and a region between the dielectric layer and the drain electrode. The field plate portion protrudes from the first side surface.
Public/Granted literature
- US20130341680A1 FIELD EFFECT TRANSISTOR Public/Granted day:2013-12-26
Information query
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