Invention Grant
- Patent Title: Keyhole-free sloped heater for phase change memory
- Patent Title (中): 用于相变存储器的无钥匙倾斜加热器
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Application No.: US13923759Application Date: 2013-06-21
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Publication No.: US09082969B2Publication Date: 2015-07-14
- Inventor: Soonwoo Cha , Tim Minvielle , Jong Won Lee , Jinwook Lee
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee Address: US ID Boise
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00 ; H01L27/24 ; G11C13/00
Abstract:
Subject matter disclosed herein relates to a method of manufacturing a semiconductor integrated circuit device, and more particularly to a method of fabricating a phase change memory device.
Public/Granted literature
- US20130286726A1 KEYHOLE-FREE SLOPED HEATER FOR PHASE CHANGE MEMORY Public/Granted day:2013-10-31
Information query
IPC分类:
