Invention Grant
- Patent Title: Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
- Patent Title (中): 堆叠的体声波谐振器包括沿着谐振器的周边的桥和声反射器
-
Application No.: US13208883Application Date: 2011-08-12
-
Publication No.: US09083302B2Publication Date: 2015-07-14
- Inventor: Dariusz Burak , Stefan Bader , Alexandre Shirakawa , Phil Nikkel
- Applicant: Dariusz Burak , Stefan Bader , Alexandre Shirakawa , Phil Nikkel
- Applicant Address: SG Singapore
- Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/02 ; H03H9/13 ; H03H9/58 ; H03H9/17 ; H03H3/04

Abstract:
In a representative embodiment, a bulk acoustic wave (BAW) resonator comprises: a cavity provided in a first layer and having a perimeter bordering an active region of the BAW resonator, a distributed Bragg reflector (DBR) bordering the cavity, wherein the first layer is one of the layers of the DBR; a first electrode disposed over the substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the second electrode; a third electrode disposed over the second piezoelectric layer; and a bridge disposed between the first electrode and the third electrode.
Public/Granted literature
Information query
IPC分类: