Invention Grant
US09083302B2 Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator 有权
堆叠的体声波谐振器包括沿着谐振器的周边的桥和声反射器

Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
Abstract:
In a representative embodiment, a bulk acoustic wave (BAW) resonator comprises: a cavity provided in a first layer and having a perimeter bordering an active region of the BAW resonator, a distributed Bragg reflector (DBR) bordering the cavity, wherein the first layer is one of the layers of the DBR; a first electrode disposed over the substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer; a second piezoelectric layer disposed over the second electrode; a third electrode disposed over the second piezoelectric layer; and a bridge disposed between the first electrode and the third electrode.
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