Invention Grant
US09085048B2 Apparatus and method for generating separating fissures in a substrate 有权
用于在衬底中产生分离裂缝的装置和方法

Apparatus and method for generating separating fissures in a substrate
Abstract:
The invention is directed to an apparatus and a method for generating separating fissures in a substrate through action of a laser beam having an elliptical beam cross section with a beam spot length in a movement direction along a separating fissure to be generated in the substrate. The apparatus and method are particularly suitable for separating fissures which start or end on the substrate surface. A suitable diaphragm prevents radiation from impinging on the substrate before the start and after the end of the fissure.
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