Invention Grant
US09085048B2 Apparatus and method for generating separating fissures in a substrate
有权
用于在衬底中产生分离裂缝的装置和方法
- Patent Title: Apparatus and method for generating separating fissures in a substrate
- Patent Title (中): 用于在衬底中产生分离裂缝的装置和方法
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Application No.: US13859882Application Date: 2013-04-10
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Publication No.: US09085048B2Publication Date: 2015-07-21
- Inventor: Sebastian Nawrodt , Ronny Ullmann , Karsten Heinig , Christian Matthies , Juergen Weisser
- Applicant: JENOPTIK Automatisierungstechnik GmbH
- Applicant Address: DE Jena
- Assignee: JENOPTIK Automatisierungstechnik GmbH
- Current Assignee: JENOPTIK Automatisierungstechnik GmbH
- Current Assignee Address: DE Jena
- Agency: Duane Morris LLP
- Priority: DE102012103176 20120412
- Main IPC: B23K26/06
- IPC: B23K26/06 ; B23K26/08 ; C03B33/09 ; H01L21/78 ; B23K26/36 ; B23K26/073 ; C03B33/10 ; B23K26/00

Abstract:
The invention is directed to an apparatus and a method for generating separating fissures in a substrate through action of a laser beam having an elliptical beam cross section with a beam spot length in a movement direction along a separating fissure to be generated in the substrate. The apparatus and method are particularly suitable for separating fissures which start or end on the substrate surface. A suitable diaphragm prevents radiation from impinging on the substrate before the start and after the end of the fissure.
Public/Granted literature
- US20130270238A1 Apparatus and Method for Generating Separating Fissures in a Substrate Public/Granted day:2013-10-17
Information query
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