Invention Grant
- Patent Title: Liquid ejecting head, liquid ejecting apparatus and piezoelectric element
- Patent Title (中): 液体喷射头，液体喷射装置和压电元件
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Application No.: US14058111Application Date: 2013-10-18
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Publication No.: US09085146B2Publication Date: 2015-07-21
- Inventor: Koji Ohashi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2012-234491 20121024
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/08 ; H01L41/09 ; B41J2/16
Abstract:
A liquid ejecting head includes a piezoelectric element, which is provided above a zirconium oxide layer having a piezoelectric layer and an electrode provided on the piezoelectric layer, in which the zirconium oxide layer is formed through a liquid-phase method and preferentially oriented with a (111) plane.
Public/Granted literature
- US20140111582A1 LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND PIEZOELECTRIC ELEMENT Public/Granted day:2014-04-24
Information query
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