Invention Grant
- Patent Title: Measuring element
- Patent Title (中): 测量元件
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Application No.: US13258570Application Date: 2010-03-01
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Publication No.: US09086302B2Publication Date: 2015-07-21
- Inventor: Axel Franke
- Applicant: Axel Franke
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009002723 20090429
- International Application: PCT/EP2010/052527 WO 20100301
- International Announcement: WO2010/124889 WO 20101104
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01D5/241

Abstract:
A measuring element for recording a deflection includes a region which is situated on a semi-conductor substrate and an electrode for influencing a conductivity of the region, the electrode being mounted deflectably in relation to the region, in such a way that an overlap region is formed between the electrode and the region, the overlap region having a dimension that is variable with a deflection of the electrode. A change in the output signal of the measuring element is a function of the conductivity of the region and is controllable by a change in the dimension of the overlap region, the change in the dimension of the overlap region having a non-linear relationship with the deflection of the electrode so that a change in the output signal of the measuring element has a non-linear relationship with the deflection of the electrode.
Public/Granted literature
- US20120025277A1 MEASURING ELEMENT Public/Granted day:2012-02-02
Information query
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