Invention Grant
US09087691B2 Method for manufacturing graphene nano-ribbon, mosfet and method for manufacturing the same 有权
石墨烯纳米带的制造方法,其制造方法及其制造方法

Method for manufacturing graphene nano-ribbon, mosfet and method for manufacturing the same
Abstract:
A MOSFET with a graphene nano-ribbon, and a method for manufacturing the same are provided. The MOSFET comprises an insulating substrate; and an oxide protection layer on the insulating substrate. At least one graphene nano-ribbon is embedded in the oxide protection layer and has a surface which is exposed at a side surface of the oxide protection layer. A channel region is provided in each of the at least one graphene nano-ribbon. A source region and a drain regions are provided in each of the at least one graphene nano-ribbon. The channel region is located between the source region and the drain region. A gate dielectric is positioned on the at least one graphene nano-ribbon. A gate conductor on the gate dielectric. A source and drain contacts contact the source region and the drain region respectively on the side surface of the oxide protection layer.
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