Invention Grant
US09087691B2 Method for manufacturing graphene nano-ribbon, mosfet and method for manufacturing the same
有权
石墨烯纳米带的制造方法,其制造方法及其制造方法
- Patent Title: Method for manufacturing graphene nano-ribbon, mosfet and method for manufacturing the same
- Patent Title (中): 石墨烯纳米带的制造方法,其制造方法及其制造方法
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Application No.: US13510390Application Date: 2011-11-18
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Publication No.: US09087691B2Publication Date: 2015-07-21
- Inventor: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201110274354 20110916
- International Application: PCT/CN2011/082418 WO 20111118
- International Announcement: WO2013/037166 WO 20130321
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L21/20 ; H01L21/36 ; H01L21/02 ; H01L29/775 ; H01L29/06 ; H01L29/16 ; H01L29/20 ; H01L29/66 ; H01L29/786 ; B82Y10/00 ; B82Y40/00 ; B82Y30/00

Abstract:
A MOSFET with a graphene nano-ribbon, and a method for manufacturing the same are provided. The MOSFET comprises an insulating substrate; and an oxide protection layer on the insulating substrate. At least one graphene nano-ribbon is embedded in the oxide protection layer and has a surface which is exposed at a side surface of the oxide protection layer. A channel region is provided in each of the at least one graphene nano-ribbon. A source region and a drain regions are provided in each of the at least one graphene nano-ribbon. The channel region is located between the source region and the drain region. A gate dielectric is positioned on the at least one graphene nano-ribbon. A gate conductor on the gate dielectric. A source and drain contacts contact the source region and the drain region respectively on the side surface of the oxide protection layer.
Public/Granted literature
- US20130069041A1 METHOD FOR MANUFACTURING GRAPHENE NANO-RIBBON, MOSFET AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-03-21
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